Abstract: This work proposes a dynamic scheduling problem of a single-armed cluster tool (SACT) by considering the wafer lots simultaneously stored in a stocker to be processed at it. In other words, ...
Abstract: Efficient scheduling of semiconductor manufacturing equipment, known as cluster tools, is essential for achieving high productivity. Cluster tools process semiconductor wafers using multiple ...
In our group, important messages often vanished into the noise — sent at odd hours, buried under a flood of chats, and seen too late (or not at all). We built this tool to change that. With manual ...
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